講座題目：High-speed Precision Motion Control via Basis Functions: Nanopositioning Applications

　　報(bào) 告 人：Qingze Zou 鄒清澤 教授

　　時(shí)　 間：2018年11月7日(周三)9:00

　　地　 點(diǎn)：中關(guān)村校區(qū)研究生教學(xué)樓5樓創(chuàng)新基地（電梯出口北側(cè)）

　　主辦單位：研究生院,、自動(dòng)化學(xué)院

　　報(bào)名方式：登錄北京理工大學(xué)微信企業(yè)號(hào)---第二課堂---課程報(bào)名中選擇“百家大講堂第127期：High-speed Precision Motion Control via Basis Functions: Nanopositioning Applications”

【主講人簡(jiǎn)介】

　　鄒清澤,，新澤西州立羅格斯大學(xué),，機(jī)械與航天系教授，曾任職于愛荷華州立大學(xué)機(jī)械工程系,。鄒教授于2003年在華盛頓大學(xué)機(jī)械工程系獲得博士學(xué)位，其研究興趣包括：基于學(xué)習(xí)的高精度運(yùn)動(dòng)控制,，高速掃描探頭顯微技術(shù),，軟體及活體樣本的高速、寬頻納米機(jī)械測(cè)試,、高速納米制造,、智能及軟執(zhí)行機(jī)構(gòu)的先進(jìn)控制、工業(yè)機(jī)器人控制。

　　鄒教授于2009年獲得美國(guó)國(guó)家科學(xué)基金會(huì)頒發(fā)的職業(yè)獎(jiǎng),，2010年獲得美國(guó)自動(dòng)控制委員會(huì)頒發(fā)的O Hugo Schuck最佳論文獎(jiǎng),。鄒教授曾任Journal of Dynamic Systems, Measurement and Control編輯，現(xiàn)任IEEE/ASME Transactions on Mechatronics, Control Engineering Practices, Mechatronics期刊的技術(shù)編輯. 鄒教授是美國(guó)機(jī)械工程師協(xié)會(huì)的會(huì)士,。

Qingze Zou is a Professor in the Department of Mechanical and Aerospace Engineering of Rutgers, the State University of New Jersey. Priorly he had taught in the Mechanical Engineering Department of Iowa State University. He obtained his Ph.D. in mechanical engineering from the University of Washington, Seattle, WA in 2003. His research interests include learning-based precision motion control, high-speed scanning probemicroscopy, rapid broadband nanomechanical mapping of soft and live samples, high-speed nanofabrication, advanced control of smart and soft actuators, and industrial robotic manipulattion. He received the NSF CAREER award in 2009, and the O Hugo Schuck Best Paper Award from the American Automatic Control Council in 2010. He is a past Associate Editor of ASME Journal of Dynamic Systems, Measurement and Control, and currently a Technical Editor of IEEE/ASME Transactions on Mechatronics, Control Engineering Practices, and Mechatronics. He is a Fellow of ASME.
 

【講座摘要】

　　高速精密運(yùn)動(dòng)控制在很多應(yīng)用中是必不可少的,，從納米級(jí)光刻，掃描探針顯微鏡（SPM）,，到增材制造等應(yīng)用場(chǎng)合,，都對(duì)運(yùn)動(dòng)控制的高速和高精度提出越來越高的要求。然而,，這些應(yīng)用帶來的挑戰(zhàn)性問題還沒有得到令人滿意的解決：需要在存在不利的非線性和動(dòng)態(tài)效應(yīng)的情況下（例如非最小相位零點(diǎn)）實(shí)現(xiàn)高速高精度軌跡跟蹤,、提高時(shí)變、不確定性系統(tǒng)的魯棒性,。需要跟蹤的期望軌跡可以是任意的,、高速的、無先驗(yàn)知識(shí)的,，跟蹤軌跡與輸出轉(zhuǎn)換之間可能存在非周期性切換,。在本次報(bào)告中，我們將介紹一種基于學(xué)習(xí)的方法來應(yīng)對(duì)這些挑戰(zhàn),，這種方法是基于迭代學(xué)習(xí)控制（ILC）框架和疊加原理的組合與擴(kuò)展,。我們將通過高速納米定位、高速SPM成像和基于探針的納米加工等實(shí)驗(yàn)過程進(jìn)行討論,，并展示相關(guān)結(jié)果,。

　　
Abstract High-speed precision motion control is essential in a wide variety of applications, ranging from nanoscale photolithography, through scanning probe microscopy (SPM), to additive manufacturing. Continuously increasing demands for both high speed and precision in these applications, however, bring challenges that haven’t been satisfactorily resolved yet: Both high-speed precision tracking and good robustness against system variation and uncertainties need to be achieved—in the presence of adverse nonlinear and dynamics effects such as nonminumum-phase zeros; The desired trajectory to be tracked is arbitrary, at high-speed, and unknown a priori; And non-periodic switching between trajectory tracking and output transition might be involved in the operations. In this talk, we will present a learning-based approach to tackle these challenges, based on the combination and extension of the framework of iterative learning control (ILC) and the superposition principle. Experimental results in high-speed nanopositioning, and high-speed SPM imaging and probe-based nanofabrication will be discussed as illustrative examples.